Gas Detection; Duct, VMB, Gas Cabinet Gas Detection

Ammonia	NH3
Arsine	AsH3
Boron Trichloride	BCl3
Bromine	Br2
Carbon Monoxide	CO
Chlorine	Cl2
Chlorine Dioxide	ClO2
Chlorine Trifluouride	ClF3
Combustible Gases
Diborane	B2H6
1,2-Dichloroethyliene *	1,2-DCE
Dichlorosilane	SiH2Cl2
Disilane	Si2H6
Fluorine	F2
Germane	GeH4
Hexafluoro-1,3-butadiene *	C4F6
Hexamethyldisilazane	HMDS
Hydrazine	N2H4
Hydrogen	H2
Hydrogen Bromide	HBr
Hydrogen Chloride	HCl
Hydrogen Cyanide	HCN
Hydrogen Fluoride	HF
Hydrogen Selenide	H2S3
Hydrogen Sulfide	H2S
Methyl Fluoride *	CH3F
Nitrogen Oxide	NO
Nitrogen Dioxide	NO2
Nitrogen Trifluoride *	NF3
Octafluorocyclopentene *	C5F8
Ozone	O3
Oxygen Deficiency	O2
Phosphorous Oxychloride	POCl3
Phosgene	COCl2
Phosphine	PH3
Silicon Tetrachloride	SiCl4
Silicon Tetrafluoride	SiF4
Silane	SiH4
Sulfur Dioxide	SO2
Sulfur Hexafluoride *	SF6
Tetraethylorthosilicate	TEOS
Trichlorosilane	SiHCl3
Trimethylborate	TMB
Trimethylphosphite	TMP
Tungsten Hexafluoride	WF6

* Denotes Satellite XT Series Pyrolyzer Detectable Gases
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Gas Detection; Duct, VMB, Gas Cabinet Gas Detection Asia